UST Corporation Inc. is a company specializing in refurbish TEL TRACK equipment and is responding quickly and accurately to equipment that customers want based on more than 20 years of various and long experience. In addition, you can modify the specification to the equipment that the customer wants by adding features that the customer's needs and wants. It can be modified for a wide range of use from 4 inches to 12 inches
Welcome to UST Corporation Inc. website
You can donwload UST company instruction file by here!
Download
Universial Semiconductor Technology Corporation Inc.SINCE 2012www. ustsemi-corp.com
UST Corporation Inc. is leader in semiconductor equipment companies, has various experiences and technology accumulated over a long period of time. Based on this, we are delivering equipment that customers want with the best quality and fast delivery time.
Track Team Department
R&D Team Department
daniel@ustsemi.com
Contact us
admin@ustsemi.com TEL : +82-31-333-2026
a b o u t U S T C o r p o r a t i o n I n c .
Refurbishment & MaintenanceModification & Custom production2nd Source production & Development
Machine 4,6,8,12 Inch Conversion, Modification and Overhaul
TEL MARK-7,8 and ACT-8,12 Modification, Up-grade and Overhaul
- System Configuration Free change, Modification and up-grade
- Open Cassette Type to SMIF Type modification and Size conversion
TEL MARK-II,V,VZ,7,8 Machine’s inch Conversion (2,4,5,6,8 inch)
- 6inch and 8inch Multi Flow
- Cassette Unit and Robot modification
- Mapping Sensor Block modification
- Main Robot Arm modification
- COAT Unit and Cup modification
- DEV Unit and Cup modification
- WDS/Plate modification
TEL ACT-8,12 Machine’s inch Conversion (4,6,8 inch)
TEL ACT-8,12 Machine’s Open Cassette to SMIF Cassette Conversion
- 6inch and 8inch Multi Flow
- Cassette Unit and Robot modification
- Mapping Sensor Block modification
- Main Robot Arm modification
- COAT Unit and Cup modification
- DEV Unit and Cup modification
- WDS/Plate modification
- System Configuration Free change, Modification and up-grade
- Open Cassette Type to SMIF Type modification and Size conversion
TEL MARK-II,V,VZ,7,8 Machine’s inch Conversion (2,4,5,6,8 inch)
- 6inch and 8inch Multi Flow
- Cassette Unit and Robot modification
- Mapping Sensor Block modification
- Main Robot Arm modification
- COAT Unit and Cup modification
- DEV Unit and Cup modification
- WDS/Plate modification
TEL ACT-8,12 Machine’s inch Conversion (4,6,8 inch)
TEL ACT-8,12 Machine’s Open Cassette to SMIF Cassette Conversion
- 6inch and 8inch Multi Flow
- Cassette Unit and Robot modification
- Mapping Sensor Block modification
- Main Robot Arm modification
- COAT Unit and Cup modification
- DEV Unit and Cup modification
- WDS/Plate modification
2nd Source New and Parts Supply
TEL MARK-II,V,VZ,7,8 and ACT-8,12 of 2nd Source Parts and Unit
- Fast delivery and low-cost and same condition with OEM parts
- Cassette stage assembly manufacture
- C/S Arm, Main Arm (Ceramic, Vacuum Arm, Aluminum and Anodizing Type) manufacture
- Plate (LHP, HHP, CPL, HCP, ADH, HEL and CP Power Supply) manufacture
- Fan Filter Unit A,B Type (Include HEPA Filter)
- Oven Central Stack manufacture of TEL ACT 8,12
2nd Source parts Unit of TEL Mark-II, V, Vz, 7,8 and ACT-8,12
- L/E Tank (45cc, 100cc, 150cc, 200cc, etc) manufacture
- TEL MARK and ACT SMIF Type Unit manufacture of same condition with OEM
- COAT Nozzle Assembly (EBR, Back Side Rinse and Photo Resist Nozzle Tip) manufacture
- DEV Nozzle Assembly (H, SH, Spray and Stream type) manufacture
- Plasma to TFT LCD modification and upgrade for TEL Mark on Low Cost
- Fast delivery and low-cost and same condition with OEM parts
- Cassette stage assembly manufacture
- C/S Arm, Main Arm (Ceramic, Vacuum Arm, Aluminum and Anodizing Type) manufacture
- Plate (LHP, HHP, CPL, HCP, ADH, HEL and CP Power Supply) manufacture
- Fan Filter Unit A,B Type (Include HEPA Filter)
- Oven Central Stack manufacture of TEL ACT 8,12
2nd Source parts Unit of TEL Mark-II, V, Vz, 7,8 and ACT-8,12
- L/E Tank (45cc, 100cc, 150cc, 200cc, etc) manufacture
- TEL MARK and ACT SMIF Type Unit manufacture of same condition with OEM
- COAT Nozzle Assembly (EBR, Back Side Rinse and Photo Resist Nozzle Tip) manufacture
- DEV Nozzle Assembly (H, SH, Spray and Stream type) manufacture
- Plasma to TFT LCD modification and upgrade for TEL Mark on Low Cost
Chemical Box and Repair
Chemical Cabinet / Auto Chemical Supply System Overhaul and upgrade
- CSS or Manual Supply or Both Type Modification
- Buffer Tank Auto Exchange Type System Modification
- Solvent/Develop/HMDS Chemical Supply System
- Resist Cabinet Photo Resist Auto-Exchange System
- Auto Drain Controller and Tray System
- CSS or Manual Supply or Both Type Modification
- Buffer Tank Auto Exchange Type System Modification
- Solvent/Develop/HMDS Chemical Supply System
- Resist Cabinet Photo Resist Auto-Exchange System
- Auto Drain Controller and Tray System
TEL Clean Track Mark and ACT-8,12 Hot and Cooling Plate
- Hot / Cooling Plate Production
- CPL, HCP, ADH, LHP, HHP Assembly Production
- Hot Plate Modification (LHP ⇔ HHP, CPL ⇔ HCP)
- Thermo Controller Production
- Same condition with OEM
- Thermo Controller and SMC 200mm / 300mm ‘s Circulator Repair
- Hot / Cooling Plate Production
- CPL, HCP, ADH, LHP, HHP Assembly Production
- Hot Plate Modification (LHP ⇔ HHP, CPL ⇔ HCP)
- Thermo Controller Production
- Same condition with OEM
- Thermo Controller and SMC 200mm / 300mm ‘s Circulator Repair
You can download the .pdf file for more detail information. clicking here!!
TCU water leakage prevent system.pdf
download
Photo resist dispense pump.pdf
download
Auto cleaning system.pdf
download
Ware pre-aligner system & FFU.pdf
Wafer pre-aligner manual ver 5.0_Eng
download
Wafer pre-aligner manual ver 5.0_Eng
download
Contact us
Address : 39-1, Deokseongsandan 1-ro 28beon-gil, Idong-eup, Cheoin-gu,
Yongin-si, Gyeonggi-do, Republic of Korea (17130)
Tel : +82-31-333-2026
e-mail : admin@ustsemi.com, marco@ustsemi.com